With its open frame design, Aerotech’s ABL3600 air bearing, linear motor driven X-Y positioning stage is aimed at semiconductor fabrication and test, scanning microscopy and other demanding scan and position applications requiring a large working aperture and perfect precision. Specifications for the 250 mm x 250 mm travel stage include a calibrated positional accuracy of +/- 1 micron, a resolution range between 1 and 200 nanometres, and scanning speeds to 200 mm/sec. Delivered as a completely tested and customer ready motion sub system with an integral granite base and full cable management, the ABL3600 can be customised with wafer industrial chucks or other customer-specific fixtures.
The preloaded high-stiffness air bearing design used on the ABL3600, developed and improved over many product generations, has been skilfully combined with the latest technology dual supplier of brushless and slotless linear motors to guarantee exceptionally smooth scanning performance and outstanding in-position stability. The combination of direct-drive servo motors, preloaded air bearings suppliers and high resolution non-contact linear encoders provides friction free mechanics with zero-backlash and no wind-up - for a major performance improvement over traditional bearing and mechanical transmission design technologies. Further benefits of the non-contact design include virtually zero maintenance and an incredibly long working life - contributing to a very low total cost of ownership for such equipment.