Electrode Feedthrough for Semiconductor Industry
Conax Technologies
Conax Technologies Electrode feedthrough with vacuum flange is used when supplying power to furnace heating elements in thin-film PV Panel production. Our customer needed to power heating elements in a high vacuum PV thin film coating process chamber. Conax used a standard high temperature flanged compression seal fitting with alumina insulators. A custom length electrode was specified by the customer and an alumina extension insulator was also supplied as part of the assembly.
