The industrial measuring systems series MFE (metrology front end) is
particularly suited to manufacturers of structured wafers, masks,
MEMS and similar products. Because of the very high cleanliness,
process and yield requirements, all tools are especially designed
for use in cleanrooms.

MFE systems measure critical dimensions and overlays on the
one hand and 3D topography or film thickness on the other.
All tools are metrological and comply with the necessary industry
standards such as the SECS II / GEM professional software interface.
Furthermore, the system is fully automated and equipped
with wafer cassettes and part carriers.

An EFEM and mini-environment for class 1 cleanrooms
rounds off the upper segment of the MFE tool series.

Features:

fully enclosed
class 1 washing room certified
cassette to cassette handling
prealignment
OCR
systems for 200 mm, 300 mm etc. available