The March TRAK series of gas plasma equipment provides
unparalleled treatment uniformity and process consistency.
A three-axis symmetrical chamber ensures all positions of the
product are treated uniformly, while tight controls over all
process parameters ensure repeatable results from product to
product.
The FlexTRAK™ is the latest addition to the March TRAK
series, and is a highly configurable, high-throughput plasma
system. Its universal architecture accommodates a multitude
of material handling configurations to support a wide assortment
of variable-size form factors. Its small chamber volume
and proprietary process control enable unmatched short cycle
times, while its slim structure minimizes floor space requirements.

HIGH-THROUGHPUT PROCESSING CAPABILITY
The FlexTRAK system handles a wide variety of product form
factors, including boats, carriers, Jedec/Auer® boats, strips,
laminates and wafers. Depending on throughput and product
form requirements, the system can be configured for magazine-
to-magazine processing of single and multiple strips or
lead frames, reel-to-reel, wafer processing, and standalone for
island-based production environments.