New from Physik Instrumente (PI) is a three-channel servo-controller module, the E-509.E3. The unit is designed for precision servo-control of nanopositioning systems equipped with PISeca™-series external, single-plate capacitive transducers.
The PISeca™ D-510 sensor heads assure non-contact measurement of the gap between the head and any conducting surface; they are available with measurement ranges of 20 µm, 50 µm and 100 µm. The range can be further extended electronically, to a maximum of 500 µm.
The system attains resolutions of 0.3 nm (less than 0.001% of the full range). With the integrated linearization functionality, excellent linearity—to 20 nm—can be attained (less than 0.1% of the measurement range). The sensors also feature high dynamic bandwidth of up to 10 kHz, making them suitable for high-dynamics vibration control systems on heavy-duty equipment.
The E-509.E3 module is designed for position servo-control in PI’s proven E-500-series modular controller systems, meaning that it is available installed in the same chassis with a wide choice of piezo professional amplifiers, professional displays and computer interface modules.
